MICROELECTROMECHANICAL SYSTEM COMB ACTUATOR AND MANUFACTURING METHOD THEREOF,申请号AU20030206225-传众专利搜索

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发明名称	MICROELECTROMECHANICAL SYSTEM COMB ACTUATOR AND MANUFACTURING METHOD THEREOF
摘要
申请公布号	AU2003206225(A1)	申请公布日期	2004.03.19
申请号	AU20030206225	申请日期	2003.02.03
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	YONG-SEOP YOON;SUNG-CHUL KIM
分类号	G02B26/08;B81B3/00;B81B7/00;B81C1/00;G02B6/35;H02N1/00;(IPC1-7):B81B7/00	主分类号	G02B26/08
代理机构		代理人
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