发明名称 Synchronous position control apparatus and method
摘要 A synchronous position control apparatus includes position controllers which perform control based on position feedback for a plurality of axes to be controlled, target position command value generators for respective axes which generate target position command values to be set in a respective position controller, and converters for respective axes which convert, on the basis of predetermined transfer functions, the target position command values for the respective axes that are output from the respective target position command value generators, and set the converted values in the respective position controllers. The characteristics of the transfer functions are set to substantially the same high-frequency cutoff characteristics for the respective axes, and the cutoff frequency of the transfer function is set to a smaller value than a servo band in any one position controller.
申请公布号 US6714842(B1) 申请公布日期 2004.03.30
申请号 US20000577607 申请日期 2000.05.25
申请人 CANON KABUSHIKI KAISHA 发明人 ITO HIROSHI
分类号 B23Q1/00;B23Q1/25;B23Q1/30;G03F7/20;G05B19/18;G05B19/414;G05D1/02;G05D3/00;G05D3/12;H01L21/027;H01L21/68;(IPC1-7):G05D1/02 主分类号 B23Q1/00
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