| 摘要 |
A system for forming a carbon film on the inner surface of a plastic container comprising a bottomed tubular outer electrode large enough to surround the outer circumference of an article to be processed, i.e. a plastic container, when it is inserted except the mouth part and the shoulder part thereof, a spacer of dielectric material being interposed at least between the mouth part and the shoulder part of the container and the outer electrode when the container is inserted, an exhaust pipe fixed through an insulating member to the end face of the outer electrode on the side where the mouth part of the container is located, an inner electrode having a hole for blowing out medium gas and being inserted into the container in the outer electrode from the exhaust pipe side substantially over the entire longitudinal length of the container and connected to the earth side, an exhaust means fixed to the exhaust pipe, means for supplying medium gas to the inner electrode, and a high frequency power supply connected with the outer electrode. |
