发明名称 |
Stocker apparatus with increased input/output capacity |
摘要 |
Within both a stocker apparatus and a method for operating the stocker apparatus there is employed: (1) a minimum of six input/output ports; (2) an array of storage locations for storing an array of work in process (WIP) product units; and (3) a random access transportation means for transporting a work in process (WIP) product unit at least bidirectionally between the minimum of six input/output ports and a storage location within the array of storage locations. Within the stocker apparatus and the method, the minimum of six input/output ports provides for more efficient operation of the stocker apparatus.
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申请公布号 |
US6739820(B2) |
申请公布日期 |
2004.05.25 |
申请号 |
US20010761296 |
申请日期 |
2001.01.16 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD |
发明人 |
CHANG YU-YEN;LIN KUO-CHEN |
分类号 |
H01L21/677;(IPC1-7):B65G1/133 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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