| 摘要 |
PURPOSE: An auto probe checking method by using a defective position display function like a point defect is provided to form a plurality of concentric circles gradually reduced their radiuses till their center and reduce the moving locus of a microscope for finding the position of a defect, thereby reducing a checking process time. CONSTITUTION: A microscope(118) is positioned at an upper portion of an LCD(Liquid Crystal) Panel(106). The microscope(118) moves up and down, and right and left. On the LCD panel(106), a defect position(B) such as a point defect is displayed and does not displayed on a computer monitor(116). A mouse pointer is identically displayed on the LCD panel(106). When a checker sets a rectangular shape region, a plurality of concentric circles(120) are formed toward center of the selection region in the LCD panel(106). The concentric circles(120) are also formed at the computer monitor(116). |
