| 摘要 |
PURPOSE: A slurry supply apparatus is provided to prevent the precipitation of slurry by circulating continuously the slurry and to minimize lead time for reusing slurry by forming an efficient cleaning path. CONSTITUTION: A slurry supply apparatus includes a slurry filter, the first pump, the second pump and a three-way valve. The slurry filter(100) includes a slurry inlet(102) at one end and a circulation inlet and outlet(104,106) at the other end. The first pump(110) for circulating slurry is installed on the first pipe(108). The first pipe is between the circulation inlet and outlet. The second pump(116) for exhausting the slurry is installed on the second pipe(114). The three-way valve(112) has the first to third direction(a,b,c). The first direction is used for flowing deionized water into the valve. The second direction is connected with the second pipe. The third direction is connected with a predetermined cross point between the first pump and the circulation inlet. The slurry is supplied by connecting the third direction with the second direction. Cleaning is performed by connecting the first direction with the second direction using the deionized water.
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