MANUFACTURING METHOD OF IMAGE FORMING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a high-performance electron source substrate preventing the deterioration or variation of electron emission property of an electron emission element due to resultant diffusion to a conductive thin film of wiring metal without contact of the wiring metal with the conductive thin film.

SOLUTION: The electron source substrate has the electron emission element consisting of the conductive thin film having a pair of element electrodes and an electron emission part and the metal wiring connected to the element electrodes on a substrate, and the element electrode comprises ruthenium oxide on the surface.

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