SUBSTRATE DETECTING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a substrate detecting apparatus of a simple construction, which detects substrates of different dimension without replacing an equipment even if the dimensions of the substrates which are to be detected are different. SOLUTION: The substrate detecting apparatus comprises: a plurality of transmission type sensors 12 which detect a substrate of different size; a plurality of pairs of sensor support means 15 that support the plurality of transmission type sensors 12 so that it can be inserted in the gap between a substrate W and a substrate housing vessel; and an advancing/retreating means 10 and a vertical movement means 9 of the sensor support means 15. The plurality of pairs of sensor support means 15 are arranged dispersedly in the widthwise direction of an opening of the substrate housing vessel. A sensor support means 17 for supporting a transmission type sensor 14 that detects a substrate of large diameter is arranged farther outside in the widthwise direction of the opening while farther protruding toward the substrate housing vessel side. The advancing/retreating means 10 is so controlled that the sensor support means 15 for supporting the transmission type sensor 12 that detects the substrate W is located at a prescribed position according to the substrate W of different size. COPYRIGHT: (C)2004,JPO&NCIPI