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发明名称
ANNULAR RECEPTACLE FOR A ROTATING CARRIER
摘要
申请公布号
SG105562(A1)
申请公布日期
2004.08.27
申请号
SG20020005821
申请日期
2002.09.25
申请人
SEZ AG
发明人
RAINER OBWEGER
分类号
H01L21/306;H01L21/00;H01L21/304;H01L21/3063;(IPC1-7):H01L21/306;B05C15/00
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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