SURFACE TREATMENT METHOD OF QUARTZ GLASS MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a surface treatment method of a quartz glass member by which uniform projecting and recessed parts are simply and even locally on the surface of the quartz glass member and the projecting and recessed shape is easily controlled. SOLUTION: The surface of the quartz glass member is formed to have the projecting and recessed shape having≥1.5μm to≤10μm average surface roughness Raand≥10μm to≤65μm maximum average height Ryusing the surface treatment method of the quartz glass member which is performed by etching the grinding machined quartz glass member with hydrofluoric acid to form the projecting and recessed parts on the surface. COPYRIGHT: (C)2004,JPO&NCIPI