| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a field emission element which is capable of light emission of good luminance and overall equal distribution, and a manufacturing method of a field emission element which prevents effectively internal electric short circuit and can form effectively an emitter for electron emission. <P>SOLUTION: In the manufacturing method of the field emission element, an emitter 50a is formed by a lift-off method and a separation layer 70 for preventing reaction is formed between a sacrifice layer 60 for emitter patterning and an emitter substance. The separation layer 70 prevents a reaction between the sacrifice layer 60 and the emitter substance and realizes an effective lift-off. Thereby, the manufacturing method of the field emission element is obtained in which the field emission element having a high luminance and overall uniform emission distribution and no defect at field emission portion is obtained. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
