发明名称 Piezo linear drive with a group of piezo actuator stacks as well as method for operating such a drive
摘要 A piezo linear drive including a group of piezo actuator stacks configured to drive a moving member located in a guidance device, and located on a joint substrate in a hybrid arrangement; wherein within a stack extending from the substrate a first stack part is configured as a longitudinal actuator and a second stack part is configured as a shearing actuator, the second stack part is equipped with a wear-resistant end plate which is in at least one of a clamping contact and shearing contact with the moving member, and at least two identical motors are located adjacent to each other in order to perform alternating clamping and advancing movements during a stepping operation.
申请公布号 US6800984(B2) 申请公布日期 2004.10.05
申请号 US20020166660 申请日期 2002.06.12
申请人 PHYSIK INSTRUMENTE (PI) GMBH & CO. KG 发明人 MARTH HARRY
分类号 H01L41/083;H01L41/09;H02N2/02;H02N2/04;(IPC1-7):H01L41/08 主分类号 H01L41/083
代理机构 代理人
主权项
地址