CHIP MOUNT HEAD FOR ULTRAPRECISION COMPONENT LOADING EQUIPMENT TO CHECK LOAD TRANSMITTED TO NOZZLE AND NOZZLE CLAMP

摘要

PURPOSE: A chip mount head for ultraprecision component loading equipment is provided to check a load transmitted to a nozzle and a nozzle clamp by installing a load cell at a nozzle clamp of the chip mount head. CONSTITUTION: A body(1) is used for setting a semiconductor chip package on a substrate. A head coupling member(3) is installed at the body. A motor(5) is installed at an upper side of the head coupling member. A head(9) is coupled to the head coupling member. A nozzle clamp(11) is installed in the inside of the head. A load cell(50) is installed in the inside of the head in order to be coupled to the nozzle clamp. A controller is installed at one side of the body in order to control the body according to a signal of the load cell.