CRYSTALLIZATION APPARATUS, CRYSTALLIZATION METHOD, PHASE MODULATION DEVICE AND DISPLAY APPARATUS TO FORM CRYSTALLIZED SEMICONDUCTOR LAYER OF LARGE DIAMETER

摘要

PURPOSE: A crystallization apparatus is provided to form a crystallized semiconductor layer of a large diameter by laterally growing a crystal from a crystal nucleus. CONSTITUTION: The phase of outgoing light with respect to incident light varies with a position in a phase modulation device(1). An illumination system(2) generates the incident light incident upon the phase modulation device. An open-phase optical system(3) is installed in the outgoing part of the phase modulation device. A stage supports a substrate having a non-single crystalline semiconductor layer installed in the outgoing part of the open-phase optical system. The phase modulation device has a phase distribution that is based upon a phase modulation unit optically smaller than the radius of a point-phase distribution range of the open-phase optical system when converted into an open-phase surface of the open-phase optical system.