| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal sensor, such as a thermal flow sensor, of high detection accuracy, equipped with a thermo-sensitive resistor having a high temperature coefficient of resistance and insusceptible to a disturbance magnetic field. <P>SOLUTION: The thermal flow sensor is provided with a thermo-sensitive fluid detection element 11 using a silicon base material and a flow detection element holder 12 for mounting the detection element 11. A magnet 13 is attached to the element holder 12, the magnet 13 being a magnetic field generation source and impressing a magnetic field on the thermo-sensitive resistor in the detection element 11. The magnet 13 impresses the magnetic field on the thin-film shaped resistor comprising nickel, nickel alloy, etc. in a direction minimizing the resistivity of magnetic metals constituting the resistance body to magnetize the magnetic metals to saturation. Even if a disturbance magnetic field is induced, a magnetic field larger than the disturbance magnetic field is impressed on the resistor to prevent its resistance value from varying, and flow detection by means of the flow sensor can be performed with high sensitivity or high accuracy. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
