ELECTRICAL WIRING STRUCTURE, METHOD FOR MANUFACTURING ELECTRICAL WIRING STRUCTURE, SUBSTRATE FOR OPTICAL DEVICE EQUIPPED WITH ELECTRICAL WIRING STRUCTURE, ELECTROOPTICAL DEVICE, AND METHOD FOR MANUFACTURING ELECTROOPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electrical wiring structure with which excellent low resistance and corrosion resistance are obtained even when corrosion resistant metal wiring and corrosion nonresistant metal wiring are electrically connected, a method for manufacturing the electrical wiring structure, a substrate for an optical device equipped with the electrical wiring structure, an electrooptical device and a method for manufacturing the the electrooptical device. SOLUTION: In the electrical wiring structure and the method for manufacturing the electrical wiring structure and so on, an oxidized layer 156 of the corrosion resistant metal and the corrosion nonresistant metal wiring are sequentially formed on the corrosion resistant metal wiring 158. An exposed part 150 is formed on the corrosion resistant metal wiring 158 by removing the oxidized layer 156 of the corrosion resistant metal, and concurrently, a conductive inorganic oxide film 154 is further formed astriding over the corrosion nonresistant metal wiring 152 and the exposed part 150. COPYRIGHT: (C)2005,JPO&NCIPI