| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration element having improved shock resistance, in which intersection of irregular shapes (fin portions) in a wet-etching process.SOLUTION: The vibration element includes: a vibration body having a drive vibration arm extending in a first direction; a first beam part extending from the vibration body and stretching in the first direction; a second beam part spaced from and parallel to the first beam part; a first connecting part connecting the first beam part and the second beam part; and a first fixed part extending from the second beam part and supporting the vibration body. In a plan view, a length L1 and thickness t of the first connecting part interposed between the first beam part and the second beam part in a region enclosed by the first beam part, the second beam part and the first connecting part, satisfy a relationship of 0.7t≤L1≤1.2t.SELECTED DRAWING: Figure 1 |
