CAPACITANCE-TYPE DIFFERENTIAL PRESSURE SENSOR AND METHOD FOR MANUFACTURING THE SAME CAPABLE OF REDUCING NOISE BY FABRICATING SENSOR THROUGH SEMICONDUCTOR MANUFACTURING PROCESS

摘要

PURPOSE: A capacitance-type differential pressure sensor and a method for manufacturing the same are provided to reduce noise by fabricating a sensor through a semiconductor manufacturing process. CONSTITUTION: A capacitance-type differential pressure sensor includes a sensing plate(40), an upper electrode(50) and a lower electrode(60). An outer peripheral portion of the sensing plate(40) is coated with an insulative material. The sensing plate(40) is bent when external pressure is applied thereto. The upper electrode(50) is bonded to the insulative material so as to fix the sensing plate(40). A predetermined portion of the upper electrode(50) is electrically connected to an external device. The lower electrode(60) transfers pressure to the sensing plate(40).