STABILIZATION METHOD OF SUBSTITUTED CYCLOTETRASILOXANE TO POLYMERIZATION BY USING FREE RADICAL SCAVENGER POLYMERIZATION INHIBITOR, TO INHIBIT POLYMERIZATION

摘要

PURPOSE: Provided are a method for stabilizing a substituted cyclotetrasiloxane to the polymerization used in the chemical vapor deposition of a siloxane for preparing an electronic material to inhibit the polymerization of the cyclotetrasiloxane, and its stabilized cyclotetrasiloxane composition. CONSTITUTION: The cyclotetrasiloxane composition comprises cyclotetrasiloxane represented by the formula; and a free radical scavenger polymerization inhibitor, wherein R1 to R7 are independently H, a linear, branched or cyclic C1-C10 alkyl group or a C1-C4 alkoxy group. Preferably the free radical scavenger polymerization inhibitor is 2,6-di-tert-butyl-4-methylphenol, 2,2,6,6-tetramethyl-1-piperidinyloxy or their mixture, and the amount is 10-1,000 ppm by weight.