METHOD FOR MANUFACTURING NANO COMPOSITE ELECTRODE FOR THIN FILM BATTERY, INCLUDING ELECTRODE MATERIAL INTEGRATED WITH SOLID ELECTROLYTE

摘要

PURPOSE: A method for manufacturing a nano composite electrode for a thin film battery is provided to improve the ionic conductivity of the electrode and thus to allow high capacity characteristics. CONSTITUTION: The method for manufacturing a nano composite electrode for a thin film battery, including an electrode material integrated with a solid electrolyte, comprises co-sputtering an electrode material and a solid electrolyte as targets. Particularly, the electrode is selected from Sn-based materials, Si-based materials, V-based materials, Li-based materials, Mn-based materials and Co-based materials, and the solid electrolyte is selected from LIPON, Ta2O5 and Li3.6Si0.6P0.4O4. The targets are arranged at an angle between 20 and 80 degrees to a substrate.