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发明名称
摘要
申请公布号	JP3616342(B2)	申请公布日期	2005.02.02
申请号	JP20010086869	申请日期	2001.03.26
申请人		发明人
分类号	G01B9/02;G01B11/00;G03F7/20;H01L21/027;(IPC1-7):G01B9/02	主分类号	G01B9/02
代理机构		代理人
主权项
地址

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