Accelerometer for geophysical application, has electronic circuit that senses variation of capacitance between mobile plate and fixed armature, and generates electrostatic return force of mobile plate

摘要

The accelerometer has a fixed armature (2) that uses variations of capacitance to detect movement of a mobile plate (5). The plate has a set of mobile electrodes (4) that are inter-digital with a series of electrodes (3, 7) integrated with the fixed armature. An electronic circuit senses the variation of capacitance between the plate and armature and generates an electrostatic return force of the plate.