| 摘要 |
PROBLEM TO BE SOLVED: To provide a chuck table of a machining apparatus capable of maintaining a workpiece without causing distortion. SOLUTION: A chuck table of a machining apparatus for suction-holding a workpiece, comprises a holding plate having a workpiece mount face formed on a smooth surface, and a support member for supporting the holding plate, wherein the holding plate has a suction pore opening on the workpiece mount face, and the support member has a first suction passage communicating between the suction pore and a suction source of the holding plate, and a second suction passage opened opposed to a region other than the suction pore of the holding plate, so as to communicate with the suction source. COPYRIGHT: (C)2005,JPO&NCIPI |
