| 摘要 |
PROBLEM TO BE SOLVED: To facilitate and ensure suction holding based on Bernoulli's theorem by blasting compressed air almost horizontally along a suction surface of a suction plate to extremely thin suction objects such as wafers in a laminated state or such as wafers and protective sheets. SOLUTION: The vacuum tweezers 1 of handheld type with a suction holding part 4 provided with a large number of suction ports 13 in the suction plate 7, on the tip side of tweezer bodies 2, 3, are provided with a blast nozzle 23 for blasting the compressed air almost horizontally along the suction surface of the suction plate 7. COPYRIGHT: (C)2005,JPO&NCIPI |
