DAMPING DEVICE AND EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To eliminate a bad influence of foreign matter caused by abrasion even when the vibration of an object to be damped is damped by frictional force. SOLUTION: A contact 61 is brought into contact with the object 41 to be damped to control the vibration of the object 41 to be damped. This damping device includes a magnetizing device 62 for attracting a substance generated by contact of the object 41 to be damped with the contact 61 by magnetic force. COPYRIGHT: (C)2005,JPO&NCIPI