| 摘要 |
PROBLEM TO BE SOLVED: To provide a means for performing superior cleaning without causing solvent shock(mainly aggregate or gel, or coating liquid dregs, caused by coating liquid of a cleaning solvent) and free from uneven cleaning when cleaning the inside of pipes of a coating apparatus supplying the coating liquid to a die head by a coating liquid supply pump from a coating liquid storage tank, and the inside of the die head. SOLUTION: This coating apparatus has a cleaning mechanism in which, when cleaning the inside of pipes of the coating apparatus and the inside of the die head, two types or more of the measured amount of solvents are used by sequentially changing from a solvent compatible with the coating liquid to one with high cleaning property, and further drying is performed by gaseous nitrogen or the like for preventing remaining of washing solvent components used for cleaning. COPYRIGHT: (C)2005,JPO&NCIPI |
