| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of correctly and efficiently machining a work at a predetermined position by allowing the work to be irradiated with laser beams of the beam shape shaped to a required machining shape and of the uniform energy. <P>SOLUTION: The laser beam machining apparatus comprises a laser beam oscillator 3, an aperture mechanism 4 to shape the beam shape of laser beams L<SB>1</SB>output from the laser beam oscillator 3, and an optical system 7 having an imaging lens 5 and an objective 6 to focus the irradiated laser beams L<SB>0</SB>passed through the aperture mechanism 4 and shaped on a work W. The aperture mechanism 4 comprises a pair of slit mechanisms 4A and 4B deviated in position in the direction of the optical axis R of the laser beams L<SB>1</SB>, and each of the slit mechanisms 4A and 4B has a pair of slit plates 8, 8, 9, 9 facing each other with tip edges of knife edges parallel to each other in the plane orthogonal to the optical axis R of the laser beams L<SB>1</SB>, and a pair of driving means 10a and 10b to independently advance/retract the slit plates 8, 8, 9, 9 in the facing direction. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
