| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer holder for a semiconductor manufacturing system in which an yield and the productivity of manufacturing a semiconductor are improved by further basically preventing the backside of a semiconductor wafer from being exposed to process reaction gas during a process. SOLUTION: In the wafer holder for the semiconductor manufacturing system, a semiconductor wafer is loaded in the sealed process space of a reaction tube, and includes a dual boat for providing an interface for placing the wafer holder therein by using first and second wafer loading boats which move vertically with respect to each other. Further, the wafer holder is stably fixed to conceal the backside of the wafer during the process, and includes a holder body to conceal the backside of the semiconductor wafer during the process in the reaction tube. A wafer lifter having a portion that can be disengaged from and coupled to the holder body so that a lower portion of the semiconductor wafer is supported by the dual boat, and so that the semiconductor wafer can be lifted up from the wafer body when the semiconductor wafer is loaded and unloaded. In a boundary between the holder body and the wafer lifter, a gas inflow interception surface is formed to hinder reaction gas from flowing through the boundary, and engaged with the wafer holder body. COPYRIGHT: (C)2005,JPO&NCIPI |
