| 发明名称 |
Method of manufacturing a structure having pores |
| 摘要 |
A method of manufacturing a nonostructure, which enables cylindrical pores arrayed according to any periodic pattern to be easily made on a substrate over a large area at a low cost in a short period of time. The method of manufacturing a structure having such pores includes the steps of preparing a substrate having recesses in its surface, providing a film on the surface of the substrate and anodizing the film. |
| 申请公布号 |
US6924023(B2) |
申请公布日期 |
2005.08.02 |
| 申请号 |
US20030609421 |
申请日期 |
2003.07.01 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
OHKURA HIROSHI;DEN TOHRU;IWASAKI TATSUYA |
| 分类号 |
G03F1/08;B23K15/00;B23K101/38;B82B1/00;B82B3/00;B82Y10/00;B82Y30/00;B82Y40/00;C23F4/00;C25D11/04;C25D11/16;G03F1/54;G03F7/20;H01L21/027;H01L21/302;H01L21/3065;H01L21/316;H01L49/00;(IPC1-7):B32B1/06 |
主分类号 |
G03F1/08 |
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