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发明名称
HEISSE PLATTE
摘要
申请公布号
AT300098(T)
申请公布日期
2005.08.15
申请号
AT20010938705T
申请日期
2001.06.15
申请人
IBIDEN CO., LTD.
发明人
HIRAMATSU, YASUJI;ITO, YASUTAKA
分类号
H05B3/20;C04B35/581;C04B35/584;C23C14/50;C23C16/46;H01L21/00;H05B3/10;H05B3/14;H05B3/16;H05B3/18;H05B3/68;H05B3/74;(IPC1-7):H01L21/02;H01L21/66;H01L21/68
主分类号
H05B3/20
代理机构
代理人
主权项
地址
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