| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic transducer capable of increasing the magnitude of a vibrating membrane during vibration, and reducing the DC bias voltage and the AC signal voltage. SOLUTION: The ultrasonic transducer comprises an upper electrode 10 composed of a vibrating membrane 2, formed by insulating materials and a conductive film 3 formed on the vibrating membrane, and a lower electrode 12, having a plurality of irregularities formed on a plane facing the vibrating membrane 2. The upper electrode and the lower electrode are adhered to each other. The ultrasonic transducer generates ultrasonic waves, by applying an AC signal between the upper electrode and the lower electrode. A resonance pipe unit 20 is prepared with a plurality of air holes 201, forming a both end aperture pipe resonating at the desired frequency in a plate 200. The resonance pipe unit 20 is fixed on the surface of the upper electrode 10. COPYRIGHT: (C)2005,JPO&NCIPI
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