发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which comprises a guard ring which can eliminate the need for exclusive reference potential wiring having a great effect of shielding substrate noise. SOLUTION: An insulating film 8 is provided in a region around a circuit region 3 on a P type silicon substrate 1, and a frame-shaped electrode 9 is provided to surround the circuit region 3. A region in the surface of the P type silicon substrate 1 under the electrode 9 is a impurity-nondoped region. A positive power potential V<SB>G</SB>is applied to the electrode 9, so that the region in the surface of the substrate 1 under the electrode 9 is formed as a depletion layer 10. As a result, substrate noise can be shielded. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005244077(A) 申请公布日期 2005.09.08
申请号 JP20040054408 申请日期 2004.02.27
申请人 NEC ELECTRONICS CORP 发明人 YAMAMOTO RYOTA;NAKASHIBA YASUTAKA
分类号 H01L21/76;H01L21/761;H01L21/765;H01L21/822;H01L23/58;H01L27/04;H01L29/00;H01L29/06;H01L29/51;H01L29/74;H01L31/111;(IPC1-7):H01L21/822 主分类号 H01L21/76
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