THREE-DIMENSIONAL SHAPE MEASURING AND ANALYZING DEVICE

摘要

A device for measuring the comparatively-large-range three-dimensional shape of an object of measuring in a short time without contacting. When a light shone onto an object of measuring s from a light source is reflected off a certain point on the surface of the object s, a high-order diffraction light is generated in addition to a direct-reflection light (zero-order light). The zero-order light is guided to the movable reflection portion of a phase variable filter (20) by a fractional optical system, and the high-order diffraction light to a fixed reflection portion; and they are respectively reflected and then converged to an almost one point by an interference optical system to allow the both to interfere with each other. When the movable reflection portion of the phase variable filter (20) is moved in such a state, the intensity of the interference light at the imaging point of the interference optical system gradually changes. Since the position of the movable reflection portion at the peak point of this interference light depends on the distance between the starting point on the object of measuring s and the movable reflection portion, the starting point position can be calculated from the position of the movable reflection portion at the peak point. Such measurement and calculation are conducted for respective points constituting the image of the object of measuring s to thereby able to measure the three-dimensional shape of the object of measuring s. When an interferogram at each point is Fourier-transformed, analysis at each point is enabled.