发明名称 |
Coaxial wiring within SOI semiconductor, PCB to system for high speed operation and signal quality |
摘要 |
An integrated circuit is provided that contains a coaxial signal line formed at least partially within a silicon-containing substrate. The coaxial signal line comprises an inner conductor having a length, said length axially surrounded by, and insulated from, an outer conductor along said length. A method of preparing such an integrated circuit having said coaxial signal line formed at least partially within a silicon-containing substrate is also disclosed herein.
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申请公布号 |
US6943452(B2) |
申请公布日期 |
2005.09.13 |
申请号 |
US20020103297 |
申请日期 |
2002.03.21 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BERTIN CLAUDE LOUIS;KELLEY GORDON ARTHUR;SCHMIDT DENNIS ARTHUR;TONTI WILLIAM ROBERT;ZALESINSKI JERZY MARIA |
分类号 |
H01L21/768;H01L21/84;H01L23/66;H05K1/02;H05K3/34;H05K3/46;(IPC1-7):H01L23/12;H01L23/48;H01L23/52;H01L29/40 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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