STRAIN SENSING ELEMENT AND PRESSURE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a strain sensing element capable of generating high-reliability electric connections with a thin film resistance part for sensing strain. SOLUTION: The invention comprises a thin film resistance 5 provided on a strain generation part 2 through an insulating film 4 and an electrode thin film 6 furnished with an electrode pad part 10 installed on the thin film resistance 5. The thin film resistance 5 has the strain sensing thin film resistance part 8 and an electrode connection part 9 connected with the strain sensing thin film resistance part 8, and the electrode connection part 9 is extended to the electrode pad part 10. The electrode pad part 10 has a bonding area 12 for external connection and a probe area 13 for inspection which are formed in differing positions. The electrode pad part 10 is positioned in a cylindrical rigid part 1 formed at the peripheral edge of the strain generation part 2. COPYRIGHT: (C)2005,JPO&NCIPI