摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of making a tantalum region composed of two phases. <P>SOLUTION: The method of making a tantalum structure includes, creating (194) a tantalum layer (230, 330, 430, 530) disposed on a first layer region (224, 324, 524) of a first layer (222, 420) and on a second layer region of a second layer (220). The tantalum layer has a substantially bcc-phase (body-centered-cubic phase) tantalum region (234, 334, 434, 534) on the first layer region, and a non-bcc-phase tantalum region (232, 332, 432, 532) on the second layer region. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |