| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce a cost by simplifying a manufacturing process of an emitter as an electron emission part of a field electron emission element. <P>SOLUTION: Cathode electrodes 5, insulation layers 6, and gate electrodes 7 are formed on a substrate 4. A metal mask 12 having openings 12a corresponding to emitter forming areas is arranged on the substrate, and emitters 8 are selectively formed by making a vapor deposition material deposit on the cathode electrode on the substrate through the openings 12a of the metal mask 12, by a normal temperature vacuum vapor deposition using a cathode electrode arc evaporation method. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
