| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer discharge lamp device having a structure capable of carrying out stable dielectric barrier discharge without exposing an external electrode to an air atmosphere. SOLUTION: This excimer discharge lamp device comprises: an excimer discharge lamp composed by adjacently arranging a plurality of excimer discharge units each comprising a discharge vessel formed of a dielectric material with a gas generating excimer discharge enclosed, and a conductor supplied with power from the outside the discharge vessel and installed in the discharge vessel; and a lighting device for applying a voltage to the excimer discharge lamp. The excimer discharge lamp device is characterized by that the lighting device is connected between the conductors of the excimer discharge units adjacent to each other. COPYRIGHT: (C)2006,JPO&NCIPI |
