| 摘要 |
PROBLEM TO BE SOLVED: To realize an electrode film which imparts conductivity to a nanotube and a cantilever and has proper adhesiveness with the nanotube and the cantilever in a probe for a scanning microscope. SOLUTION: In the probe for the scanning microscope, a palladium film 17 is formed on the required region of the surface 10 of a cantilever protruding part and the base-end part 16 of the nanotube is brought into contact with and arranged on the palladium film, in a state with the leading end part 14 of the nanotube protruding outwardly, to use the leading end 14a of the nanotube as the leading end of the probe for detecting a signal. A coating film 18 is formed to the surface of this base end part so as to cover a part or the whole thereof, and the nanotube 12 is strongly fixed to the cantilever 4. Since the base end part 16 is closely bonded to the palladium film 17, both are set to an electrical continuous state. The palladium film 17 enables application of voltage to the nanotube 12 or making continuity of an electrode film and has proper adhesiveness with the nanotube and the centilever. COPYRIGHT: (C)2006,JPO&NCIPI |
