| 摘要 |
A thermal bend actuator ( 6 ) is provided with upper arms ( 23, 25, 26 ) and lower arms ( 27, 28 ) which are non planar, so increasing the stiffness of the arms. The arms ( 23, 25, 26, 27, 28 ) may be spaced transversely of each other and do not overly each other in plan view, so enabling all arms to be formed by depositing a single layer of arm forming material. |
