| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a field emission electron source having a long life as an electron source by increasing jointing strength between a carbon nano material and a negative electrode member and having a good yield at manufacture, and furthermore provide the field emission electron source in which optical adjustment is easy by improving matching degree of the axial direction of the carbon nano material and the axial direction of the electron optical system. <P>SOLUTION: In the field emission electron source in which a thin wire member 2 made of a carbon nano material is jointed at the tip of a negative electrode member 1 and electrons are emitted from the tip of the thin wire member 2, the thin wire member 2 is jointed on a flat surface 1a formed at the tip of the negative electrode member 1, thereby stress of the thin wire member 2 generated by jointing is reduced. Furthermore, the direction of the flat surface 1a and the direction of the optical axis are made almost orthogonal, thereby degree of matching of the axial direction of the thin wire member 2 and the direction of the optical axis 37 of the electron optical system is improved, and the electron beams can be transported efficiently by a simple optical adjustment, and the aberration can be made small. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
