发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR, AS WELL AS DESIGNING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device, capable of utilizing maximum use of the areas of four corners in a semiconductor chip region and moreover, capable of conducting easy and sure linewidth control, as much as possible, and to provide its manufacturing method, as well as, its design method. SOLUTION: In four corner sections (clearances formed between a sealing ring 9 and an I/O-ring 7) in the semiconductor chip region, the same linewidth control region 10, having the configuration of an octagon formed of a plurality of sides neighbored to a beveled seal ring 9, while carrying out position matching with the sealing ring 9 and which is specified here so as to be a right octagon, is arranged respectively. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009076787(A) 申请公布日期 2009.04.09
申请号 JP20070246195 申请日期 2007.09.21
申请人 FUJITSU MICROELECTRONICS LTD 发明人 FUJITA KAZUJI;NANJO RYOTA
分类号 H01L21/66 主分类号 H01L21/66
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