发明名称 Microfeature systems including adhered microfeature workpieces and support members
摘要 Methods and systems for adhering microfeature workpieces to support members are disclosed. A method in accordance with one embodiment of the invention includes disposing a first adhesive on a surface of a microfeature workpiece, and disposing a second adhesive on a surface of a support member. The method can further include adhesively attaching the microfeature workpiece to the support member by contacting the first adhesive with the second adhesive while the second adhesive is only partially cured. In further particular embodiments, the first and second adhesives can have different compositions, and the second adhesive can be fully cured after the microfeature workpiece and support member are adhesively attached.
申请公布号 US7518237(B2) 申请公布日期 2009.04.14
申请号 US20060407560 申请日期 2006.04.19
申请人 MICRON TECHNOLOGY, INC. 发明人 CLYNE CRAIG T.;FERNANDEZ JOHN C.
分类号 H01L23/34;H01L21/00 主分类号 H01L23/34
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