| 摘要 |
PROBLEM TO BE SOLVED: To provide a reduced-pressure drying method and a reduced-pressure drying device capable of correctly performing reduced-pressure drying processing on a substrate. SOLUTION: Pressure values in a chamber at a plurality of time points T1, T2, T3 during the reduced-pressure drying processing when the reduced-pressure drying processing is properly executed, are taken out from RAM as pressure values in properly executing the reduced-pressure drying processing. The pressure values in the chambers at the plurality of time points T1, T2, T3 are measured after starting the reduced-pressure drying processing. Then, the measured pressure values and the pressure values memorized in RAM 51 are compared to determine whether the measured pressure values are within a range of adequate pressure values or not. When the difference between the measured pressure value and the pressure value memorized in RAM is over a set range, the abnormality in processing is informed by utilizing an alarming means. COPYRIGHT: (C)2009,JPO&INPIT |
