| 摘要 |
PROBLEM TO BE SOLVED: To measure density of particles with high accuracy.SOLUTION: A measurement device comprises: a density measurement unit 18 that measures particle number density in gas; a humidity measurement unit 38 that measures the humidity of atmosphere to which the particle is exposed at a time when the density measurement unit measures the number density for calculating mass density of the particle in the gas on the basis of information indicative of a correlation of mass of the particle with respect to the humidity of the atmosphere to which the particle is exposed, the number density measured by the density measurement unit, and the humidity of the atmosphere to which the particle is exposed; a first housing 30 that stores the density measurement unit and the humidity measurement unit, and has a first inlet port 32 and first exhaustion port 34; and a first emission unit 36 that emits the gas in the first housing from the first exhaustion port. The humidity measurement unit is provided in an upstream with respect to the density measurement unit in a flow channel of the gas toward the first exhaustion port from the first inlet port.SELECTED DRAWING: Figure 5 |
