| 摘要 |
PROBLEM TO BE SOLVED: To provide a flaw detection method capable of enhancing the flaw detection sensitivity of an inspection target. SOLUTION: The flaw detection method includes the flaw emphasizing treatment process and the flaw detecting process. The flaw emphasizing treatment process includes the process ST20 for forming a smoothed image from a photographed image, the process ST21 for successively selecting an inspection target pixel, the process ST22 for dividing a plurality of comparing target pixels, which are arranged to the periphery of the noticing pixel of the smoothed image corresponding to the inspection target pixel into a plurality of comparing target pixel groups to set them, the process ST23 for determining brightness difference data being the difference between the respective comparing target pixels of the comparing target pixel groups and the respective brightness values of the inspection target pixels and calculating the minimum brightness difference becoming minimum in its value at intervals of the comparing target pixel groups, and the process ST24 for setting the minimum brightness difference becoming maximum in its value in the minimum brightness difference calculated at intervals of the comparing target pixel groups. The flaw detecting process discriminates a flaw from the feature quantity of a flaw candidate region constituted of the flaw candidate pixels extracted by comparing a flaw emphasizing value with a threshold value. COPYRIGHT: (C)2009,JPO&INPIT |
