| 摘要 |
Substrate-transferred, deep trench isolation silicon-on-insulator (SOI) semiconductor devices formed from bulk semiconductor wafers are disclosed. In this regard, a bulk semiconductor wafer is provided that includes a bulk body, one or more transistors formed in the bulk body, and deep trenches formed between the transistors formed in the bulk body to provide isolation between the transistors. To prevent the bulk body from electrically interconnecting the transistors, the bulk body is thinned near, at, or beyond a back side of the deep trenches formed in the bulk body to form separate bulk bodies for each transistor isolated by the deep trenches. An insulation substrate is bonded to the bulk semiconductor device to form an SOI wafer. In this manner, residual bulk bodies of the transistors in the SOI wafer are isolated between the deep trenches and the insulation substrate to reduce or avoid leakage current between transistors. |
