Dynamic creation of backup fiducials

摘要

Multiple reference fiducials are formed on a sample on a sample for charged particle beam facilities processing of the sample. As one fiducial is degraded by the charged particle beam, a second fiducial is used to create one or more additional fiducials.

主权项

1. A method of aligning a charged particle beam for processing, comprising:
creating at least one primary fiducial at a location proximal to a region of interest, the at least one primary fiducial being identifiable by image recognition; creating at least one first backup fiducial; processing the region of interest with the charged particle beam using the at least one primary fiducial to position the beam relative to the region of interest; and continuing processing the region of interest using the at least one backup fiducial to track the location of the region of interest after the primary fiducial is degraded by exposure to the charged particle beam.