发明名称 |
Wet etching method for an N-type bifacial cell |
摘要 |
The present invention discloses a wet etching method for an N-type bifacial cell including: (1) providing an N-type silicon wafer, proceeding with surface structuralization on the N-type silicon wafer, and producing a PN junction on a surface 5 of the N-type silicon wafer by using a boron diffusion technique; (2) proceeding with a first mixed acid washing, etching the PN junction on an edge and a back surface of the N-type silicon wafer; (3) proceeding with a first pure water washing and a first alkaline washing, removing residual acid solution from the surface of the N-type silicon wafer; (4) proceeding with a second pure water washing and a second mixed acid washing, 10 removing residual impurities from the surface of the N-type silicon wafer; (5) proceeding with a third pure water washing and air drying; and (6) after air drying, completing etching on the N-type bifacial cell. Under the premise of assuring the cell efficiency is not reduced, the present invention increases the polishing passivation effect on the back surface to increase the optical-electrical conversion efficiency of the N-type 15 bifacial cell. Furthermore, increasing the etching on the edge and the back surface removes the PN junction diffused to the edge of the N-type silicon wafer during the boron diffusion procedure, avoiding the leakage problem on the edge of the N-type bifacial cell product. |
申请公布号 |
AU2015323848(B2) |
申请公布日期 |
2016.09.22 |
申请号 |
AU20150323848 |
申请日期 |
2015.05.14 |
申请人 |
Shanghai Shenzhou New Energy Development Co., Ltd. |
发明人 |
Zheng, Fei;Zhang, Zhongwei;Shi, Lei;Ruan, Zhongli;Zhao, Chen;Zhao, Yuxue |
分类号 |
H01L31/18 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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