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发明名称
摘要
申请公布号
JPS4874726(A)
申请公布日期
1973.10.08
申请号
JP19720001170
申请日期
1971.12.30
申请人
发明人
分类号
H01J9/233;H01J31/38;H01L31/08;H01L31/18
主分类号
H01J9/233
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代理人
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